Product line TCNF
Product line TCNF, featuring an innovative internal cooling, reducing movement of focal spot by more than 90%, is recommended for computed tomography (CT), metrology (DM), and high resolution (HR) inspection in electronics industry and science. These X-ray tubes have an internal liquid cooling of tube head for permanent stability of focal spot position, a liquid cooling of the turbo pump to avoid vibrations and provide and provide an ultimate JIMA resolution of 0.5 microns (μm) and highest magnification for semiconductor, electronics, and composite applications, featuring the High Resolution Diamond Target.
Product line TCNF
Microfocus X-ray tube XWT-160-TCNF
Highlights
- Ultimate JIMA resolution and magnification for semiconductor, electronics, and composite applications
- Developed for inline and offline two- and three-dimensional X-ray inspection
- Internal cooling of tube head to stabilize focal spot position – less than +/- 1 µm focal spot movement *
- Liquid cooling of turbo pump to avoid vibrations
- Automatic venting valve for long life of vacuum components
*in laboratory setup
Rating
Resolution |
Power |
Magnification |
Applications
Industries
Non-destructive microfocus X-ray inspection in electronics industry, e.g.:
- Ball Grid Arrays (BGA), integrated circuits (IC), bond wires
- Semiconductor packaging (diodes, wafer bumps, copper)
- Shielded devices, housings, complete modules
- Wafer-level chips scale packages (WLCSP)
- Quad-Flat-Packages no-leads (QFN), similar components
- Printed circuit boards, hidden interconnects
- Bare boards, multilayer boards
- Power modules, IGBT modules
Non-destructive microfocus X-ray inspection in scientific institutions, e.g.:
- Plastics, ceramics, light alloys
- Compounds, fibre reinforced materials
- Organic materials, seeds, tree trunks
- Soils, ice drilling cores
- Concrete, rocks
- Archaeological finds, paintings, statues
- Superconductive material
Technical details
| Data | Product line TCNF | |||
|---|---|---|---|---|
| Max. voltage (kV) | 160 | 190 | 225 | |
| Min. voltage (kV) | 20 | |||
| Max. current (mA) | 1.0 | |||
| Min. current (mA) | 0.05 | |||
| Max. power, target (Watt) | 25 | |||
| Tube type | Transmission | |||
| Target type | High Resolution Diamond | |||
| Target material (substrate/active layer) | Diamond / Tungsten | |||
| Min. focus-object-distance (FOD, mm) | 0.3 | |||
| Opening angle (approx. °) | 160 | |||
| Mounting length incl. 90° HV plug (mm) | 739 | 739 | 810 | |
| Tube weight (approx. kg) | 38 | 38 | 58 | |
| Operation Mode | Target power range (W)/th> | JIMA resolution range (µm) |
|---|---|---|
| Nanofocus | 0.1 - 1.5 | 0.5 – 1.5 |
| Microfocus | 1.0 – 10.0 | 1.5 – 3.0 |
| High Power | 10.0 – 25.0 | 3.0 – 15.0 |
Technical details product line TCNF
Max. voltage: 160 kV, 190 kV, 225 kV
Min. voltage: 20 kV
Max. current: 1.0 mA
Min. current: 0.05 mA
Max. power, target: 25 Watt
Tube type: Transmission
Target type: High Resolution Diamon
Target material (substrate/active layer): Diamond / Tungsten
Min. focus-object-distance (FOD): 0.3 mm
Opening angle (approx.): 160°
Mounting length incl. 90° HV plug:
- 160 kV, 190 kV: 739 mm
- 225 kV: 810 mm
Tube weight (approx.):
- 160 kV, 190 kV: 38 kg
- 225 kV: 58 kg
Scope of delivery
- Open microfocus X-ray tube with transmission target, turbo vacuum pump, vacuum gauge, and electronic drive unit
- Cooling elements for turbo pump
- Internal water cooling of tube head
- High voltage generator and high voltage cable
- Prevacuum pump with vacuum hose
- Cooling unit with hoses and cooling agent
- Tube controller, power supplies, and safety relays on 19″ mounting panels
- Set of cables for electrical connection of X-ray tube and components
- Spare parts case, documentation, and operating software
Options and accessories
- Transmission targets coated with various materials, like molybdenum, copper, or silver
- Beam collimator
- Filter holder (including Al, Cu and Sn filters of different thicknesses)
- 50 W target power with internal target cooling (TCNF Plus)
- Tube extension with mounting threads at tube head
- 19″ rack for controller and power supplies including start button and warning light
- Control computer
- Exchangeable tube head with reflection target for up to 350 Watt power
Contact sales departement
If you are interested in our products or if you need a quote for one of our products, please contact our sales team.