Continuous monitoring of system resolution ensures high quality results of microfocus or nanofocus X-ray systems. Japan Inspection Instruments Manufacturers’ Association (JIMA) conducts vigorous activities concerning various testing equipment including nondestructive testing equipment. The JIMA resolution tests allow the monitoring of the X-ray image chain down to line structures with distance of 0.1 microns. Three test charts are available for different resolutions as well as one test chart for computed tomography.