Product line TCNF Plus

Product line TCNF Plus, featuring an innovative internal cooling, reducing movement of focal spot by more than 90%, is recommended for computed tomography (CT), metrology (DM), and high resolution (HR) inspection in electronics industry and science. These X-ray tubes have an internal liquid cooling of tube head for permanent stability of focal spot position, a liquid cooling of the turbo pump to avoid vibrations and provide and provide an ultimate JIMA resolution of 0.5 microns (μm) and highest magnification for semiconductor, electronics, and composite applications, featuring the High Resolution Diamond Target.

Product line TCNF Plus

Microfocus X-ray tube XWT-160-TCNF Plus with innovative internal cooling

Microfocus X-ray tube XWT-160-TCNF Plus


  • Ultimate JIMA resolution and magnification for semiconductor, electronics, and composite applications
  • Developed for inline and offline two- and three-dimensional X-ray inspection
  • Internal cooling of tube head to stabilize focal spot position – less than +/- 1 µm focal spot movement *
  • Liquid cooling of turbo pump to avoid vibrations
  • Automatic venting valve for long life of vacuum components
*in laboratory setup


Resolution - 5 stars
Power - 4 stars
Magnification - 4 stars



Non-destructive X-ray inspections in electronics industry

Non-destructive microfocus X-ray inspection in electronics industry, e.g.:
  • Ball Grid Arrays (BGA), integrated circuits (IC), bond wires
  • Semiconductor packaging (diodes, wafer bumps, copper)
  • Shielded devices, housings, complete modules
  • Wafer-level chips scale packages (WLCSP)
  • Quad-Flat-Packages no-leads (QFN), similar components
  • Printed circuit boards, hidden interconnects
  • Bare boards, multilayer boards
  • Power modules, IGBT modules

Non-destructive microfocus X-ray inspection in scientific institutions

Non-destructive microfocus X-ray inspection in scientific institutions, e.g.:
  • Plastics, ceramics, light alloys
  • Compounds, fibre reinforced materials
  • Organic materials, seeds, tree trunks
  • Soils, ice drilling cores
  • Concrete, rocks
  • Archaeological finds, paintings, statues
  • Superconductive material

Technical details

Data Product line TCNF Plus
Max. voltage (kV) 160 190
Min. voltage (kV) 20
Max. current (mA) 1.0
Min. current (mA) 0.05
Max. power, target (Watt) 50
Tube type Transmission
Target type High Resolution Diamond
Target material (substrate/active layer) Diamond / Tungsten
Min. focus-object-distance (FOD, mm) 0.3
Opening angle (approx. °) 160
Mounting length incl. 90° HV plug (mm) 739 739
Tube weight (approx. kg) 38 38
Operation Mode Target power range (W) JIMA resolution range (µm)
Nanofocus 0.1 - 1.5 0.5 – 1.5
Microfocus 1.0 – 10.0 1.5 – 3.0
High Power 10.0 – 50.0 3.0 – 35.0

Technical details product line TCNF Plus

Max. voltage: 160 kV, 190 kV

Min. voltage: 20 kV

Max. current: 1.0 mA

Min. current: 0.05 mA

Max. power, target: 50 Watt

Tube type: Transmission

Target type: High Resolution Diamon

Target material (substrate/active layer): Diamond / Tungsten

Min. focus-object-distance (FOD): 0.3 mm

Opening angle (approx.): 160°

Mounting length incl. 90° HV plug:

  • 160 kV, 190 kV: 739 mm

Tube weight (approx.):

  • 160 kV, 190 kV: 38 kg

Operation mode: Nanofocus

  • Target power range (W): 0,1 - 1,5
  • JIMA resolution range (µm): 0,5 – 1,5

Operation mode: Microfocus

  • Target power range (W): 1,0 – 10,0
  • JIMA resolution range (µm): 1,5 – 3,0

Operation mode: High Power

  • Target power range (W): 10,0 – 50,0
  • JIMA resolution range (µm): 3,0 – 35,0

Scope of delivery

  • Open microfocus X-ray tube with transmission target, turbo vacuum pump, vacuum gauge, and electronic drive unit
  • Cooling elements for turbo pump
  • Internal water cooling of tube head
  • High voltage generator and high voltage cable
  • Prevacuum pump with vacuum hose
  • Cooling unit with hoses and cooling agent
  • Tube controller, power supplies, and safety relays on 19″ mounting panels
  • Set of cables for electrical connection of X-ray tube and components
  • Spare parts case, documentation, and operating software

Options and accessories

  • Transmission targets coated with various materials, like molybdenum, copper, or silver
  • Beam collimator
  • Filter holder (including Al, Cu and Sn filters of different thicknesses)
  • Tube extension with mounting threads at tube head
  • 19″ rack for controller and power supplies including start button and warning light
  • Control computer
  • Exchangeable tube head with reflection target for up to 350 Watt power