JIMA RT RC-04 resolution test

The JIMA resolution test chart JIMA RT RC-04 of Japan Inspection Instruments Manufacturers' Association is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray inspection systems. JIMA RT RC-04 supports resolutions between 0.1 microns and 10 microns. This corresponds to focal spot sizes between 0.2 microns and 20 microns.

Layout + case and cross section

JIMA RT RC-04 Layout and Case

Layout + case of JIMA RT RC-04 resolution test chart

 

Structure of JIMA RT RC-04 mask

Structure of JIMA RT RC-04 resolution test chart

JIMA RT RC-04 resolution chart

JIMA RT RC-04 Layout

JIMA RT RC-04 resolution test chart

Technical data

  • Line and space size: 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.5, 2.0, 3.0 ,4.0 ,5.0 ,6.0, 7.0, 8.0, 9.0,10.0 µm (line and space are same width)
  • Each slit consists of 8 lines, T-shape layout
  • Absorption material: tungsten, thickness >= 650nm
  • Protection film: PET-film 25 μm (including bonding layer)
  • Silicium-base: 15 µm +/- 1 µm (thickness)
  • Housing size: 40 x 30 x 5 mm (W x H x D)
  • Chip size: 5 x 5 x 0.06 mm (W x H x D)
  • Pattern precision: tolerance: +/- 10%
  • Operation temperature range: 10°C to 70°C
  • Supplied in a air suspension case with test report

Recommended application

Fix the resolution test on the manipulator of your X-ray system. Select the distances of detector, sample and tube in a way that a high geometric magnification is achieved. Select the desired X-ray parameters. Position the resolution test in front of the tube so that the line patterns are clearly visible. Move the test chart using the manipulator so that the next lines with smaller distances get visible. Continue as long as the separate lines are clearly resolved. The focal spot size is approximately calculated as minimum resolution multiplied by two.
 

Note: Minimize the duration of radiation. Switch off X-rays during the procedure. The heat in front of the target may damage the test chart.

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