JIMA resolution test
About JIMA
Continuous monitoring of system resolution ensures high quality results of microfocus or nano-resolution X-ray systems. Japan Inspection Instruments Manufacturers’ Association (JIMA) conducts vigorous activities concerning various testing equipment including nondestructive testing equipment. The JIMA resolution tests allow the monitoring of the X-ray image chain down to line structures with distance of 0.1 microns. Three test charts are available for different resolutions as well as one test chart for computed tomography.
JIMA RT CT-01 resolution chart
Adapting the most advanced technology of semiconductor processing, a new resolution chart for computed tomography (CT) systems has been developed. It utilizes gold (Au) as absorption material and offers 5 different sizes of lines and spaces, ranging from 3 microns to 7 microns. The new test chart is very useful to verify the performance of microfocus CT systems during calibration, alignment, setup, and after maintenance.
JIMA RT RC-04 resolution chart
The JIMA resolution test chart JIMA RT RC-04 of Japan Inspection Instruments Manufacturers' Association is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray inspection systems. JIMA RT RC-04 supports resolutions between 0.1 microns and 10 microns. This corresponds to focal spot sizes between 0.2 microns and 20 microns.
JIMA RT RC-05 resolution chart
The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-05 is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray inspection systems. JIMA RT RC-05 supports resolutions between 3 microns and 50 microns. This corresponds to focal spot sizes between 6 microns and 100 micron.
JIMA RT RC-02B resolution chart
The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-02B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nano-resolution X-ray system. JIMA RT RC-02B supports resolutions between 0.4 microns and 15 microns. This corresponds to focal spot sizes between 0.8 microns and 30 microns.