The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-05 is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nanofocus X-ray inspection systems. JIMA RT RC-05 supports resolutions between 3 microns and 50 microns. This corresponds to focal spot sizes between 6 microns and 100 micron.

Layout + case and cross section

JIMA RT RC-05 Layout and Case

Layout + case of JIMA RT RC-05 resolution test chart

 

Cross-Section JIMA RT RC-05

Cross section of JIMA RT RC-05 resolution test chart

JIMA RT RC-05 resolution chart

JIMA RT RC-05 Layout

JIMA RT RC-05 resolution test chart

Technical data

  • Slit dimensions: 3, 4, 5, 6, 7, 8, 9, 10, 15, 20, 25, 30, 35, 40, 45, and 50 microns
  • Dimensions of the test frame: 40 x 30 x 3 mm (WxHxD)
  • Chip size: 8 x 8 x 0.2 mm (WxHxD)
  • Thickness of absorption material: >1.0 µm gold
  • All of the pattern sizes have been measured by SEM at typical points. The data are shown in the document of certification.
  • Pattern precision: within [-10%, +10%]
  • Operation temperature range: 10° to 70°C

Recommended application

Fix the resolution test on the manipulator of your X-ray system. Select the distances of detector, sample and tube in a way that a high geometric magnification is achieved. Select the desired X-ray parameters. Position the resolution test in front of the tube so that the line patterns are visible. Move the test chart with the manipulator so that the next smaller bundle of line pairs is visible. Continue as long as the lines are clearly visible. The focal spot size is approximately calculated as minimum resolution multiplied by two.

 

Note: Minimize the duration of radiation. Switch off X-rays during the procedure. The heat in front of the target may damage the test chart.

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