The JIMA (Japan Inspection Instruments Manufacturers' Association) resolution test chart JIMA RT RC-02B is a micro chart fabricated by using the latest semiconductor lithography techniques. It is used for calibration and monitoring of system resolution and ensures high quality results of your microfocus or nanofocus X-ray system. JIMA RT RC-02B supports resolutions between 0.4 microns and 15 microns. This corresponds to focal spot sizes between 0.8 microns and 30 microns.

Layout + case and cross section

JIMA LRT_RC-20B Layout and Case

Layout + case of JIMA RT RC-02B resolution test chart

 

Cross-Section-JIMA-RT-RC-02B

Cross section of JIMA RT RC-02B resolution test chart

JIMA RT RC-02B resolution chart

JIMA RT RC-02B resolution chart

JIMA RT RC-02B resolution chart

Technical data

  • Slit dimensions: 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.5, 2.0, 3.0, 4.0, 5.0, 6.0, 7.0, 10.0, 15.0 µm
  • Each slit consists of 7 lines. The 15 µm slit has 5 lines.
  • All of the pattern sizes have been measured by SEM at typical points. The data are shown in the document of certification.
  • Overall dimensions (WxHxD): 40 x 30 x 5 mm
  • Chip size (WxHxD): 5 x 5 x 0.06 mm
  • Thickness of absorption material: 1.0 µm tungsten
  • Pattern precision: within [ 0, +10%] for ≤ 2 µm patterns, within [ 0, + 8%] for ≥ 3 µm patterns
  • Operation temperature range: 10° to 70°C

Recommended application

Fix the resolution test on the manipulator of your X-ray system. Select the distances of detector, sample and tube in a way that a high geometric magnification is achieved. Select the X-ray parameters in the range between 60kV and 90kV. Use low current to keep the focal spot as small as possible. Position the resolution test in front of the tube so that the line patterns are visible.

Now optimize X-ray parameters to achieve the smallest focal spot possible. Basically this can be obtained by reducing the tube power as long as the resolution test patterns are still visible. Move the test chart with the manipulator so that the next smaller bundle of line pairs is visible. Continue as long as the lines are clearly visible. The focal spot size is approximately calculated as minimum resolution multiplied by two.

 

Note: Minimize the duration of radiation. Switch off X-rays during the procedure. The heat in front of the target may damage the test chart.

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